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College of Management / 管理學院
Information Management / 資訊管理學系
Hierarchical Equipment Health Index Framework
Details
Hierarchical Equipment Health Index Framework
Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Volume
32
Journal Issue
3
Pages
267-276
Date Issued
2019
Author(s)
CHIA-YEN LEE
Dong, Z.-H.
DOI
10.1109/TSM.2019.2925362
URI
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85068173806&doi=10.1109%2fTSM.2019.2925362&partnerID=40&md5=9264443f2d46317a9925f376a0b0edeb
https://scholars.lib.ntu.edu.tw/handle/123456789/526180
SDGs
[SDGs]SDG9
Type
journal article