Dip coating cooperated with stepped rotating lithography to fabricate rigid microstructures onto a metal roller

Resource

MICROELECTRONIC ENGINEERING, 87(11), 2091-2096

Journal

Microelectronic Engineering

Pages

2091-2096

Date Issued

2010

Date

2010

Author(s)

Wu, Jing-Tang

Lai, Hsin-Chun

Huang, Tzu-Chien

Wu, Sheng-Hsin

DOI

URI

Type

journal article

File(s)

Name

333.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):bd4664663ef193b41ffb08e3a7fc4a89