A CMOS-MEMS sngle-chip dal-axis groscope
Journal
International Microsystems, Packaging, Assembly and Circuits Technology Conference
Date Issued
2009-10
Author(s)
Abstract
A dual-axis gyroscope is designed and implemented using TSMC 0.18µm 1P6M process. A set of middle comb fingers are used to drive the gyroscope in the z direction so that Coriolis force can be induced when angular velocity occures in the other two perpendicular directions. By using folded springs, the sense fingers are allowed to move in one direction. IDOS type of sense finger are chosen to detect the angular velocity in the x direction, and ISOD type is chosen to detect the angular velocity in the y direction. The capacitive readout circuit is designed to transform the capacitance variation to a voltage. The sensitivity of angular velocity in the x and y directions are 0.087 mV pp /°/s and 0.017 mV pp /°/s, respectively.
SDGs
Type
conference paper