Electrical Measurements to Detect Liquid Concentration
Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Volume
1
Journal Issue
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85124662556&doi=10.1109%2fTSM.2021.3126128&partnerID=40&md5=10a8437762140275fd22ec8074409860
Pages
11??5??35
Date Issued
2022
Author(s)
Abstract
DI water; Dielectric dispersion; Ionic response; IPA; Liquid concentration
Subjects
Capacitance measurement; Carbon dioxide; Liquids; Semiconductor device manufacture; DI water; Electrical measurement; Ionic response; IPA; Liquid concentration; Liquid contents; Lower frequencies; Semiconductor manufacturing process; Static and dynamic conditions; Static measurements; Capacitance
Type
journal article