Sputter damage in Si (0 0 1) surface by combination of C60 + and Ar+ ion beams

Resource

Applied Surface Science 255 (5): 2490-2493

Journal

Applied Surface Science

Journal Volume

255

Journal Issue

5 PART 1

Pages

2490-2493

Date Issued

2008

Author(s)

Yu, B.-Y.

Lin, W.-C.

Chen, Y.-Y.

Lin, Y.-C.

Shyue, J.-J.

DOI

URI

SDGs

[SDGs]SDG7

Type

journal article

File(s)

Name

31.pdf

Size

710.58 KB

Format

Adobe PDF

Checksum

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