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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A MEMS electrostatic resonator for a fast-scan STM system
Details
A MEMS electrostatic resonator for a fast-scan STM system
Journal
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems
Pages
549-552
Date Issued
2010
Author(s)
Liao, H.-H.
Shen, H.-H.
Liao, B.-T.
Yang, Y.-J.
Chen, Y.-C.
YAO-JOE YANG
Pai, W.-W.
DOI
10.1109/NEMS.2010.5592458
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/448516
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-78649236143&doi=10.1109%2fNEMS.2010.5592458&partnerID=40&md5=e637cd6dbba18e4f2a70c8e1cb312aaa
SDGs
[SDGs]SDG7
Type
conference paper
