Simultaneous detection of translational and angular displacements of micromachined elements

Journal

Applied Physics Letters

Journal Volume

91

Journal Issue

22

Date Issued

2007

Author(s)

Hwu, E.-T.

Hung, S.-K.

Yang, C.-W.

Hwang, I.-S.

Huang, K.-Y.

KUANG-YUH HUANG

DOI

10.1063/1.2817750

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447757

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-36549074536&doi=10.1063%2f1.2817750&partnerID=40&md5=5a61c3a0edf90c3ef8e2dcca9bb13568

Type

journal article