Interactions of Dielectric Nano Surface Structures on Metallic Film Coupled Surface Plasmon：Simulation and Fabrication of a Sub-wavelength Dielectric Optical Head for Nanowriter
Date Issued
2005
Date
2005
Author(s)
Yang, Dong-Lin
DOI
zh-TW
Abstract
Based on the new physical phenomena－extraordinary transmission and directional beaming phenomena, the physical origin and optimization rule of dielectric optical head have been proposed in this thesis. And it has been verified that the optical head can produce a confined emitted beam in far field and suppress the decay of intensity simultaneously.
Dielectric optical head is composed of dielectric grating layer constructed on a thin gold film deposited onto the glass substrate. In view of the limitation to fabricate nano-scaled metallic structure, dielectric grating can be flexibly manufactured via various processes, such as nanoimprint for mass production. In this thesis, a new simulation model proposed on rigorous coupled wave analysis (RCWA) has been utilized to explore the extraordinary transmission and directional beaming phenomena of the dielectric optical head. More significant results can be obtained through the new simulation model, which requires fewer computations efforts. The optimization rule proposed for directional beaming emphasizes the importance of selecting wavelength and period of grating. This research also draws the relation between the simulated results from rigorous coupled wave analysis and finite difference time domain (FDTD) method to confirm the surface plasmon wave involved in diffraction.
Experimental results obtained from the optical head developed based on the e-beam lithography fabricated dielectric grating agree well with the simulated results obtained by using the optimization design. Besides, it is verified for the first time that the dielectric optical head can produce a subwavelength beam in far field and suppress the decay of intensity simultaneously as that of the metal head published previously.
Subjects
表面電漿子
surface plasmon
dielectric optical head
Type
thesis
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