Probabilistic Response of Micro-Fabricated Polysilicon Beam Structures:Analysis and Experimental Verification
Resource
1993 ASME Winter Annual Meeting, Symposium on Micro-Mechanical Systems, New Orleans, LA(1993.11)
Journal
1993 ASME Winter Annual Meeting, Symposium on Micro-Mechanical Systems
Journal Issue
New Orleans
Pages
-
Date Issued
1993-11
Date
1993-11
Author(s)
Lin, Liwei
Type
conference paper