High-Performance Metal/SiO2/InSb Capacitor Fabrication by Photoenhanced Chemical Vapor Deposition

Resource

Journal of Applied Physics, v.68 n.7, p.3701-3706

Journal

Journal of Applied Physics

Journal Volume

v.68 n.7

Pages

3701-3706

Date Issued

1990

Date

1990

Author(s)

Yang, Seng-Jenn

URI

Type

journal article