Novel method for measuring the thickness of quartz using a plate wave sensor

Journal

Journal of the Chinese Society of Mechanical Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Journal Volume

25

Journal Issue

4

Pages

321-328

Date Issued

2004

Author(s)

Lee, C.-Y.

Cheng, Y.-C.

Chen, Y.-Y.

Chang, P.-Z.

Dai, C.-L.

Chen, P.-H.

Pao, S.-Y.

Chen, W.-J.

URI

Type

journal article