Design and assembly methodology of the structure of high precision 3-axis linear stage in nanometer accuracy
Date Issued
2010
Date
2010
Author(s)
Ke, Zhi-Yuan
Abstract
This thesis studies and develops the design and assembly methodology of Nano-scale measurement machines. Three types of machines are developed, namely a micro coordinate measuring machine (Micro-CMM), a co-planar stage of micro milling machine, and a nano height gauge.
In Chapter 2, for adapting the assembly tolerance of the Laser diffraction grating interferometer (LDGI) and the DVD displacement sensor, an optimum flexure mechanism for angle adjustment is developed and introduced.
Because the accuracy requirement of the Micro-CMM is stricter than the conventional CMM, the assisted measurement and adjustment methods are becoming more urgent and critical. Chapter 3 studies and develops a set of methods to precisely adjust and align machine components in spatial co-planarity, squareness and parallelism.
Chapter 4 studies how to design and assemble two kinds of coplanar stages for Micro-CMM and micro milling machine, respectively. The static safe factor analysis of linear guide, part replacement analysis, structural sketch and generalized chain are used to ensure the functionality and reliability of coplanar stages. The assembly errors are validated by experiments.
Chapter 5 studies how to design and assemble the Z-axis stage of Micro-CMM. Vibration experiments are carried out to assist the design. The part replacement analysis, structural sketch and generalized chain are used to the creative design of the z-axis stage. In addition, the static safe factor analysis of cross roller guide has been carried out to ensure the functioning reliability of the Z-axis. Besides, In order to increase the load efficiency, and understand the pulley system characteristic, the element configuration table is used. Finally, experiments and assembly error analyses are carried out to prove the measuring stability of the Z-axis.
Chapter 6 studies how to design and assemble a height measuring machine in nanometer resolution. It includes four main modules: transmission module, measurement module, control module and signal subdivision module. In order to achieve accuracy and repeatability, the assembly error analysis and counter weight analysis are studied. Experiments show the repeatability of less than 10nm can be reached.
Subjects
Micro-CMM
Nano height gauge
Co-planar stage
Flexure angle mechanism
Linear diffraction grating Interferometer
Assembly
Alignment
Type
thesis
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