A micromachined ZnO/Si3N4 Lamb wave device for ultraviloet sensing application

Journal

2010 IEEE International Frequency Control Symposium, FCS 2010

Pages

493-498

Date Issued

2010

Author(s)

Wang, W.-S.

Wu, T.-T.

DOI

10.1109/FREQ.2010.5556279

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/487026

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-77957878311&doi=10.1109%2fFREQ.2010.5556279&partnerID=40&md5=2668f3a5ae957f760b8e7b27e6e782ff

Type

conference paper