Fabrication and simulation of passive cantilever valves in micro-channel
Date Issued
2008
Date
2008
Author(s)
Lin, Hsieh-Te
Abstract
Abstract A micro-fluid system usually involves micro channel、micro valve、micro actuator and micro sensor. It can be applied in different areas after integrating other devices. This study uses FEM computational software to research how cantilever type valve acts under different pressures and develop micro valve which can be used under low pressure. PDMS material’s Young’s modulus is 1.4 MPa and Poisson ratio is 0.49. This study uses PDMS material as cantilever type valves. Before simulation, the independence of meshes should be tested. To improve the accuracy of simulation results. Simulation results shows a linear relation between dis- placements of valves and pressures. And compare 2D results and 3D preliminary resu- lts. Fabricate valve module by MEMS techniques, and use syringe pump as an actuating source. There are two size micro valves which are fabricated. Compare t- wo valves by infuse/withdraw ratio. The ratio of valve 2 is 1.6 under 0.25 Hz operati- ng frequency.
Subjects
micro valve
passive valve
fluid structure interaction
moving mesh
Type
thesis
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