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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
An Experimental Investigation on Silicon Wafer Thinning Process
Details
An Experimental Investigation on Silicon Wafer Thinning Process
Journal
中國機械工程學刊
Journal Volume
29卷
Journal Issue
5期
Pages
405-412
Date Issued
2008
Author(s)
Chuan-Chieh Lin
Hong-Tsu Young
Jing-Pou Zhan
URI
http://www.airitilibrary.com/Publication/Index/02579731-200810-29-5-405-412-a
http://scholars.lib.ntu.edu.tw/handle/123456789/339277
Type
journal article