Substitutional carbon reduction in SiGeC alloys grown by rapid thermal chemical vapor deposition

Resource

Applied Physics Letters 75 (15): 2271-2273

Journal

Applied Physics Letters

Journal Volume

75

Journal Issue

15

Pages

2271-2273

Date Issued

1999

Date

1999

Author(s)

Liu, C.W.

Tseng, Y.D.

Huang, Y. S.

URI

Type

journal article

File(s)

Name

08.pdf

Size

104.14 KB

Format

Adobe PDF

Checksum

(MD5):b80f00eef2dc5e53e69134e57a307c46