Planarization, Fabrication and Characterization of Three-dimensional Magnetic Field Sensors
Journal
IEEE Transaction on Nanotech
Journal Volume
17
Journal Issue
1
Pages
11-25
Date Issued
2018
Author(s)
Van Su Luong
Yu-Hsin Su
Chih-Cheng Lu
Jen-Tzong Jeng
Jen-Hwa Hsu
Jong-Ching Wu
Meng-Huang Lai
Ching-Ray Chang
Type
journal article