Effect of solvent on morphological properties of TiOx thin film
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
7396
Date Issued
2009
Author(s)
Abstract
Sol-gel preparation of amorphous titanium oxide (TiOx) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiOx thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiOx thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiOx film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiOx thin film on the hydrophobic substrate because of its smooth surface morphology.
Type
conference paper