Etching Submicrometer Trenches by Using the Bosch Process and its Application to the Fabrication of Antireflection Structures
Resource
Journal of Micromechanics and Microengineering,15(3),580-585.
Journal
Journal of Micromechanics and Microengineering
Journal Volume
15
Journal Issue
3
Pages
580-585
Date Issued
2005-03
Date
2005-03
Author(s)
Chang, C. L.
Wang, Y. F.
Kanamori, Yoshiaki
Shih, J. J.
Kawai, Yusuke
Lee, C. K.
Wu, K. C.
Esashi, Masayoshi