A CMOS MEMS Gas Sensor Using Monolayer Protected Gold Nano-Clusters Coating on Three-Dimensional Interdigitated Electrodes
Journal
AVS 59th International Symposium & Exhibition
Date Issued
2012-10
Author(s)
Y. C. Chen
C. Y. Chang
H. L. Lu
C. J. Lu
WEI-CHENG TIAN
Type
conference paper