Influence of sputtering power on the electrical properties of In-Sn-Zn oxide thin films deposited by high power impulse magnetron sputtering

Journal

Coatings

Journal Volume

9

Journal Issue

11

Date Issued

2019

Author(s)

Li, Z.-Y.

Chen, S.-C.

Huo, Q.-H.

Liao, M.-H.

Dai, M.-J.

Lin, S.-S.

Yang, T.-L.

Sun, H.

DOI

10.3390/coatings9110715

URI

https://www.scopus.com/inward/record.url?eid=2-s2.0-85075546892&partnerID=40&md5=c02f8b31c073faff00f21bff2942be9e

https://scholars.lib.ntu.edu.tw/handle/123456789/547498

SDGs

[SDGs]SDG7

Type

journal article