Buckled-type valves integrated by parylene micro-tubes

Resource

Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 656-659

Journal

Sensors and Actuators A Physical

Pages

241-246

Date Issued

2005

Date

2005

Author(s)

Wang, Jiun-Min

Liu, Kuan-Chun

Ko, Kai-Chung

Yang, Lung-Jieh

DOI

URI

Type

conference paper

File(s)

Name

82.pdf

Size

23.42 KB

Format

Adobe PDF

Checksum

(MD5):ba886fc08e108dc75a26ef756225f74e