Development of electromagnetic scanning stage for astigmatic profilometer

Journal

2015 IEEE International Conference on Mechatronics and Automation

Pages

2145-2150

Date Issued

2015

Author(s)

Chang, B.-C.

Ding, R.-F.

Juang, B.-J.

KUANG-YUH HUANG

BIING-CHWEN CHANG

DOI

10.1109/ICMA.2015.7237818

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447734

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84955268948&doi=10.1109%2fICMA.2015.7237818&partnerID=40&md5=99b43289b0686ef2a349105954e6bc59

Type

conference paper