Magnetic Micro Gripper Design and haracterization of Dual-Sensing-Mode Micro Accelerometers
Date Issued
2009
Date
2009
Author(s)
Chang, Yao-Tien
Abstract
In this thesis, to design a micro magnetic gripper is main part. Also, the torque generated by magnetic anisotropy is calculated. We use commercial software (L-Edit) to draw our layout and then the device is fabricated by the MetalMUMPs process. There are three types of the force/moment which are generated by magnetic field, including Lorentz force, the attraction or exclusion of a magnet, and the magnetic moment. In this paper, we introduce the principles and examples of these three methods. In addition, we designed many different prototypes which are the change in aspect ratio of nickel block and silicon nitride. We use commercial software (Mathematica) to calculate the relationship between magnetic field and angle. In another part of this paper, simulate and calculate the voltage changes in piezoresistive sensing of micro accelerometer with a hybrid piezoresistive/capacitive sensing technique. We use an experimental setup which is integrated a PZT and a function generator. It reduced much time of experiment and obtained a lot of data. Finally, we get linear relationships between output voltage and displacement.
Subjects
MEMS
Mignetic Gripper
Dual-Sensing-Mode Micro Accelerometers
Type
thesis
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