LineDiff entropy: Lossless layout data compression scheme for maskless lithography systems

Journal

IEEE Signal Processing Letters

Journal Volume

20

Journal Issue

7

Pages

645-648

Date Issued

2013

Author(s)

Tang, C.-K.

Su, M.-S.

DOI

10.1109/LSP.2013.2261493

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/502238

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84877897981&doi=10.1109%2fLSP.2013.2261493&partnerID=40&md5=551996b372d5c3b87a3c1aebdccdf665

Type

journal article