Advances in high $κ$ gate dielectrics for Si and III-V semiconductors
Journal
Journal of Crystal Growth
Journal Volume
251
Journal Issue
1
Pages
645-650
Date Issued
2003
Author(s)
Kwo, J
Busch, B
Muller, DA
Chabal, YJ
Kortan, AR
Mannaerts, JP
Yang, B
Ye, P
Gossmann, H
others
Type
journal article