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College of Electrical Engineering and Computer Science / 電機資訊學院
Computer Science and Information Engineering / 資訊工程學系
Modeling, scheduling, and prediction in wafer fabrication systems using queueing Petri net and genetic algorithm
Details
Modeling, scheduling, and prediction in wafer fabrication systems using queueing Petri net and genetic algorithm
Resource
Robotics and Automation, 2001. Proceedings 2001 ICRA. IEEE International Conference on
Journal
IEEE International Conference on Robotics and Automation, 2001
Pages
-
Date Issued
2001
Date
2001
Author(s)
Wen, Hung-We
Fu, Li-Chen
LI-CHEN FU
DOI
10.1109/ROBOT.2001.933169
DOI
1050-4729
URI
http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021249
Type
conference paper
File(s)
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Name
00933169.pdf
Size
609.89 KB
Format
Adobe PDF
Checksum
(MD5):c4c4a0bcfd5f88511419076fe5cf083e
