A step-by-step experiment of 3C-SiC hetero-epitaxial growth on 4H-SiC by CVD

Journal

Applied Surface Science

Journal Volume

357

Pages

985-993

Date Issued

2015

Author(s)

Xin, B.

Jia, R.-X.

Hu, J.-C.

Tsai, C.-Y.

Lin, H.-H.

Zhang, Y.-M.

DOI

10.1016/j.apsusc.2015.09.090

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/500385

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84949500366&doi=10.1016%2fj.apsusc.2015.09.090&partnerID=40&md5=817f78e73c7b17b63bd557cebc93a26b

Type

journal article