CO2 Gas-Assisted Micro Hot Embossing Process for Large-Area Replication of Microstructures

Journal

The 2nd Asian Symposium on Nano Imprint Lithography(ASNIL), 7-8 October 2009, Taipei 2009, Taiwan

Date Issued

2009

Author(s)

Sen-Yeu Yang

Jing-Tang Wu

Ying-Ta Chu

Yi-Hao Huang

URI

Type

conference paper