Temperature event triggered sensors using internal resonance frequency combs
Journal
Journal of Micromechanics and Microengineering
Journal Volume
35
Journal Issue
8
Start Page
085004
ISSN
0960-1317
1361-6439
Date Issued
2025-08-01
Author(s)
Abstract
This work presents a temperature event-triggered sensor that leverages vibro-impact induced internal resonance to generate frequency combs as event indicators. In particular, by strategically placing an output stopper near the resonator, the allowable displacement at resonance is restricted, thus inducing vibro-impact dynamics. The resulting nonlinear superharmonic signals interact with high-order normal modes and trigger internal resonance once meeting the requirement of an integer frequency ratio. To achieve this, this work incorporates VIA gratings of the CMOS-microelectromechanical systems process platform to activate 1:5 internal resonance between the 1st and 3rd flexural modes while maintaining a uniform structural profile. By aligning internal resonance with the two-attractor hysteresis region at a fixed driving frequency, frequency combs are selectively activated through a specific temperature cycling sequence—from 27 °C down to below 21 °C and then heated back to 27 °C. The event-triggered sensor registers the presence of frequency combs as bit ‘1’ when experienced to this thermal cycle and resets to bit ‘0’ when the temperature exceeds 27 °C, enabling temperature event monitoring applications with reconfigurability.
Subjects
CMOS-MEMS
event-triggered sensor
internal resonance
mechanical frequency combs
MEMS resonator
Publisher
IOP Publishing
Type
journal article