The fringe-capacitance of etching holes for CMOS-MEMS

Journal

Micromachines

Journal Volume

6

Journal Issue

11

Pages

1617-1628

Date Issued

2015

Author(s)

Wang, Y.-T.

Hu, Y.-C.

Chu, W.-C.

Chang, P.-Z.

DOI

10.3390/mi6111445

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486810

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84949565148&doi=10.3390%2fmi6111445&partnerID=40&md5=50e5f93436ac168bdbb07ad490a2be3a

Type

journal article