Design and Fabrication of CMOS Differential Circuit for Micro-Displacement Sensing
Date Issued
2011
Date
2011
Author(s)
Tsai, Po-Chao
Abstract
Probing into design of the capacitance detecting circuit for the ring type gyroscope is the purpose of this thesis. Ring type gyroscope is a small structure made with MEMS process. The sensing signal of this gyroscope due to the gap changes while the angular velocity variation , then the capacitive value between the gap changes too. The capacitive value is very small and usually of fF grade. If we connect this signal to the sensing circuit on PCB , this signal can not be examined out because the signal/noise ratio is too small. So in this thesis , we design and fabrication the capacitance sensing circuit in integrated circuit technology in order to reduce the noise of the sensing circuit.
For our capacitive displacement sensing circuit, the work efficiency is limited by the capacitor charge and discharge times. Therefore, we use the different duty cycle carrier to increase the sensing time and the overall structure performance.
This dissertation is applying 0.35μm Mixed-Signal 2P4M Polycide 3.3/5V manufacture process of TSMC which is provided by NSC Chip Implementation Center. Finally, using Hspice software designed by Synopsys co. to simulate and Virtuoso software designed by Candence co. to layout.
Subjects
capacitive sensor
analog integrated circuit
folded cascode amplifier
IC design
layout
Type
thesis
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