Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net
Journal
IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans.
Journal Volume
33
Journal Issue
5
Pages
641-648
Date Issued
2003
Author(s)
Abstract
In a 300 mm integrated circuit (IC) foundry fab, the intrabay automation is more important than a 200 mm one. In general, the intrabay automation systems include the automated controls of the process tools, overhead hoist transports (OHTs), stockers, and rail shortcuts. These control systems are operated concurrently. They must be cooperated seamlessly to increase the system performance and to avoid deadlocks. In this paper, the behaviors of the intrabay automation systems are modeled using the distributed agent oriented Petri net (DAOPN). The fab intrabay DAOPN models are categorized into the new-order generation, OHT vehicle dispatching, zone control, path decision, and tool processing agent models. Finally, the DAOPN is defined, and the modeling procedures of the intrabay behaviors are all illustrated. Consequently, an experimental intrabay OHT loop is discussed and evaluated using the proposed DAOPN models and the DAOPN simulator.
Subjects
Automation
Computer simulation
Database systems
Distributed computer systems
End effectors
Multi agent systems
Petri nets
Process control
User interfaces
Dispatching
Distributed agent oriented Petri net
Distributed multiagent system
Fab intrabays
Integrated circuit foundry fab
Overhead hoist transports
Integrated circuit layout
Type
letter