Study on the fabrication of CMOS-MEMS and the computer-aided MEMS design
Resource
Bulletin of the College of Engineering, N. T. U,0(91),21-32.
Journal
Bulletin of the College of Engineering, N. T. U
Journal Volume
0
Journal Issue
91
Pages
21-32
Date Issued
2005-01
Date
2005-01
Author(s)
Cheng, Y.-C.
Lee, C.-Y.
Chang, P. Z.
Chen, Ping-Hei
Type
journal article