Effect of XeF laser treatment on structure of nanocrystalline diamond films
Resource
Diamond and Related Materials, 19(5-6), 445-448
Journal
Diamond and Related Materials
Journal Volume
19
Journal Issue
5-6
Pages
445-448
Date Issued
2010
Date
2010
Author(s)
Abstract
Nanocrystalline diamond (NCD) films were deposited on Si substrates by microwave plasma-enhanced chemical vapor deposition (MPECVD) using methane/hydrogen/oxygen (30/169/0.2 sccm) as process gases. Subsequently a thin (0.33 μm) and a thick (1.01 μm) NCD films were irradiated with XeF excimer laser (λ = 351 nm) with 300 and 600 mJ cm- 2 of energy densities in air. The NCD films became rougher after laser irradiations. Fraction of graphitic clusters decreased but oxygen content increased in the thin NCD film after laser irradiation. Opposite phenomena were observed for the thick NCD films. Effect of laser irradiation to oxygenation and graphitization of NCD films was correlated with structural properties of free surface and grain boundaries of the thin and thick NCD films. © 2010 Elsevier B.V. All rights reserved.
SDGs
Publisher
Elsevier B.V.
Type
journal article
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