Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate

Journal

2005 IEEE Conference on Electron Devices and Solid-State Circuits, EDSSC

Pages

107-110

Date Issued

2006

Author(s)

Yeo, C.C.

Lee, M.H.

Liu, C.W.

Choi, K.J.

Lee, T.W.

Cho, B.J.

DOI

10.1109/EDSSC.2005.1635217

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/502109

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-43549119975&doi=10.1109%2fEDSSC.2005.1635217&partnerID=40&md5=e8c98e84cb5f397f9f2bca0f2112bbad

Type

conference paper