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Research Center / 研究中心
University-Level Research Centers / 校級研究中心
Center for Condensed Matter Sciences / 凝態科學研究中心
離子濺鍍法成長矽碳氮薄膜及其機械性質研究=Ion Beam Sputtered Growth and Mechanical Properties of SiCN Films
Details
離子濺鍍法成長矽碳氮薄膜及其機械性質研究=Ion Beam Sputtered Growth and Mechanical Properties of SiCN Films
Journal
材料科學與工程
Journal Volume
33
Journal Issue
1
Pages
38-43
Date Issued
2001
Author(s)
王春
馬廣仁
陳貴賢
柯琪
林麗瓊
DOI
10.6409/JMSE.200103.0038
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/481888
Publisher
材料科技聯合會
Type
journal article
