An AFM Scanning Method with a Rotating Probe and an Adaptive Scanning Speed Strategy
Journal
Proceedings of the IEEE Conference on Decision and Control
Journal Volume
2022-December
ISBN
9781665467612
Date Issued
2022-01-01
Author(s)
Abstract
Since its invention in 1986, the AFM (Atomic Force Microscope) has been one of the most prominent tools to help us examine and understand the microscopic world. However, it does not come without disadvantages. The most glaring and noticeable ones are the generally slow imaging speed, distortion due to the probe geometry, and the nonuniform data distribution at different slopes of the sample topography. In this paper, we focus on trying to provide means to deal with the last two simultaneously. To alleviate distortion due to tip geometry, we introduce a scanning method with a dynamically rotating probe. The raster scanning pattern is adopted, where the trace path is scanned conventionally, with its data helping us gain a rough idea of the sample topography. Then, the trace scanning data tells us where and when the probe should rotate and what angle to rotate so that the probe consequently follows such guidance on the retrace path. On the other hand, to ensure better uniformity of data density on every part of the sample, scanning speed along the fast axis is adaptive so that the probe tip is able to track the topography. Lastly, a simple calibration method is proposed to reasonably merge scanned data points at different probe rotating angles. Simulation results are given to test the feasibility and effectiveness of said methods.
Type
conference paper