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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
The Development of a Six-Axial Nano-Positioning Stage
Details
The Development of a Six-Axial Nano-Positioning Stage
Journal
The 7th International Conference on Positioning Technology
Pages
ICPT16001_B4_1
Date Issued
2016
Author(s)
Fu-Cheng Wang
Ru-Chang Wu
Yi-Yi Chen
Kuo-An Wang
Tien-Tung Chung
Jia-Yush Yen
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/412628
Type
conference paper