Complete reversal imprinting for fabricating microlens arrays with faithful shape replication
Journal
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Journal Volume
27
Journal Issue
6
Pages
2781-2785
Date Issued
2009
Author(s)
Huang, P.-H.
Abstract
This article reports a complete reversal imprinting technique for fabrication of microlens array. During this process, by pressing the polymethyl methacrylate substrate against the stainless-steel mold coated with UV-curable resin, the resin microlens array can be transferred from mold to substrate. With this modification of reversal imprinting, the microlens array could be fabricated without difficulty. The uniformity, profiles, and optical properties of the microlenses have been verified. This complete reversal imprinting technique shows its great potential for fabricating microlens arrays with faithful replication.
Type
conference paper