Effects of conducting layers on surface acoustic wave in AlN films on diamond
Journal
Journal of Applied Physics
Journal Volume
106
Journal Issue
12
Date Issued
2009
Author(s)
Abstract
The interdigital transducer (IDT)/AlN/conducting layer/diamond structures are investigated in this study to design surface acoustic wave (SAW) devices in the super high frequency band. Simulation results using the finite element method show that a thin conducting layer can effectively increase the coupling coefficient and, thus, broaden the bandwidth of SAW devices. For the Sezawa mode, it is illustrated that using a Ti layer with a layer thickness-to-wavelength ratio of 0.02 the maximum coupling coefficient is 2.546% and the associated SAW phase velocity is 10657 m/s at the AlN films’ thickness-to-wavelength ratio of 0.14. This coupling coefficient is 105% higher than that in the IDT/AlN/diamond structure. The research results can be applied to design SAW devices using diamond based structures in the super high frequency band.
Type
journal article