Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High-庥 Y 2 O 3 on GaAs(001)-4 ? 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy

Journal

ACS Omega

Journal Volume

3

Journal Issue

2

Pages

2111-2118

Date Issued

2018

Author(s)

Cheng, C.-P.

Chen, W.-S.

Cheng, Y.-T.

Wan, H.-W.

Yang, C.-Y.

Pi, T.-W.

Kwo, J.

DOI

10.1021/acsomega.7b01564

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443302

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85053126076&doi=10.1021%2facsomega.7b01564&partnerID=40&md5=207e600954cff5c41566f8950fdeb52e

Type

journal article