Modeling and optimization of wafer-level spatial uniformity with the use of rational subgrouping

Resource

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Journal

1999 IEEE International Symposium on Semiconductor Manufacturing Conference

Pages

429-432

Date Issued

1999-10

Date

1999-10

Author(s)

Chen, Argon

Liu, Cheewee

Lin, A.

DOI

URI

Type

conference paper

File(s)

Name

00808828.pdf

Size

300.95 KB

Format

Adobe PDF

Checksum

(MD5):1e5c908d8fc2a38d480127992ad6b08c