Macromodels of 3D lateral viscous damping effects for MEMS devices

Resource

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Journal

12th International Conference on Solid-State Sensors, Actuators and Microsystems,

Pages

-

Date Issued

2003-06

Date

2003-06

Author(s)

Yen, Po-Ching

DOI

N/A

URI

Type

journal article

File(s)

Name

01217148.pdf

Size

293.79 KB

Format

Adobe PDF

Checksum

(MD5):f23619f312553e9f096fcacd9ffcfeaf