Surface morphology and sub-surface damaged layer of various glasses machined by 193 nm ArF excimer laser

Journal

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Journal Volume

5715

Pages

110-117

Date Issued

2005

Author(s)

Liao, Y.-S.

Chen, Y.-T.

Chao, C.-L.

Liu, Y.-M.

Chao, Choung-Lii

YUNN-SHIUAN LIAO

Liao, Yunn-shiuan

DOI

10.1117/12.592034

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448669

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-21844445113&doi=10.1117%2f12.592034&partnerID=40&md5=4db84c1b49fee3594fc9ec3653d2b463

Type

conference paper