Fabrication and Characterization of Surface-grating Light-emitting Diodes
Date Issued
2012
Date
2012
Author(s)
Lin, Chih-Chun
Abstract
The variations of the output intensity and electrical property of a surface-grating lateral light-emitting diode (LED) with different grating periods on the p-GaN mesa are demonstrated. By fabricating one-dimensional surface gratings of similar duty cycles and groove depths, it is found that the device resistance of a surface grating LED is higher than that of the reference LED of a flat mesa surface. Also the device resistance increases slightly with increasing grating period. The output intensity of a surface grating LED is higher than that of the reference LED. Also, it increases when the grating period is increased. The measurement of angle-dependent output intensity shows the consistent results.
Subjects
Surface grating
Light-emitting diode
ICP-RIE etching
Type
thesis
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