Method of Forming a Nanotip Array in a Substrate by Forming Masks on Portions of the Substrate and Etching the Unmasked Portions

Date Issued

2005

Author(s)

Kuei-Hsien Chen

Jih-Shang Hwang

Hong-Chun Lo

Debajyoti Das

DOI

U. S. Patent 6,960,528 B2

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503889

Description

Nov. 1?

Type

patent