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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Extraction of Frequency Dependent Macromodel for Gas Damping and Spring Effects for MEMS Devices
Details
Extraction of Frequency Dependent Macromodel for Gas Damping and Spring Effects for MEMS Devices
Journal
2000 Solid-State Sensor and Actuator Workshop
Date Issued
2000
Author(s)
Y.-J. Yang
YAO-JOE YANG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587824
Description
Hilton Head, SC
Type
conference paper