A dynamic 3-D surface profilometer with nano-scale measurement resolution and MHz bandwidth for MEMS characterization

Resource

IEEE/ASME Transactions on Mechatronics,12(3),299-307.

Journal

IEEE/ASME Transactions on Mechatronics

Pages

299-307

Date Issued

2007-01

Date

2007-01

Author(s)

Huang, Yao-Ting

Fan, Kuang-Chao

DOI

URI

Type

journal article