Skip to main content
English
中文
Log In
Log in
Log in with ORCID
NTU Single Sign On
Have you forgotten your password?
Home
College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Numerical Simulation for Air Flow in the Mini-Environment and SMIF Enclosure
Details
Numerical Simulation for Air Flow in the Mini-Environment and SMIF Enclosure
Resource
IEEE Transactions on Semiconductor Manufacturing 16 (1): 60-67
Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Volume
16
Journal Issue
1
Pages
60-67
Date Issued
2003
Date
2003
Author(s)
Shiu, Huan-Ruei
Huang, Hsiao-Yi
Chen, Sih-Li
Ke, Ming-Tsun
DOI
10.1109/TSM.2002.807737
URI
http://ntur.lib.ntu.edu.tw//handle/246246/86509
https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037330811&doi=10.1109%2fTSM.2002.807737&partnerID=40&md5=899c550b6d5b47620ac3a91dc60e3890
Type
journal article
File(s)
Loading...
Loading...
Download
Name
19.pdf
Size
521.65 KB
Format
Adobe PDF
Checksum
(MD5):7fcd17d529d285830db94abf2b62a498
